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Yttrium-doped Zirconia (YSZ) single crystal substrate is one of the earliest materials used in high-temperature superconducting thin films.
Usually using the zirconium oxide necessary to incorporate yttria as a stabilizer. Common doping concentration in 13 mol%, YSZ has a good mechanical and chemical stability, low cost. It has been named Yttria stabilized zirconia.
Because of zirconium oxide material with high hardness, high strength, high toughness, high wear resistance and excellent chemical resistance and many physical and chemical properties, zirconium oxide has been widely applied in various fields: ceramics, refractories, machinery, electronics, optics, aerospace, biology, chemistryand so on.
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The main performance parameters |
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Product Name |
Yttrium-doped Zirconia (YSZ) single crystal substrate/wafer |
|
Crystal structure |
Cubic |
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Lattice constant |
a=5.147 Å |
|
Growth method |
Skull melting Technique |
|
Melt point（℃） |
2700 |
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Density（g/cm3）: |
6.0 |
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Hardness: |
8-8.5（mohs） |
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Purity: |
99.99% |
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Thermal expansion（/℃） |
10.3×10-6 |
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Dielectric constants |
ε=27 |
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Packing |
class-100 clean bag，calss1000 clean room |
| Standard Specification | |||||
| Product Name | Orientation | Standard Size | Thickness | Polishing | |
| YSZ substrate |
<100> ±0.5° <110> ±0.5° <111> ±0.5° Or other off-angle |
10x10mm 10x5mm 5x5mm 25x25mm 50x50mm φ1" x 0.5mm φ2" x 0.5mm Or others |
0.1mm 0.2mm 0.5mm 1.0mm 2.0mm Or others |
Fine ground Single side polished Double side polished Roughness: Ra<5A(0.5nm) |
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